jauge de bombement de plaquette

CONT: Wafer bow is one of the deformities that can cause a wafer to to lose dimensional integrity. This becomes very important with high-resolution photolithography (3 to 4 um line widths or less). A bow gauge is used, either as part of a complete wafer inspection system, or as an individual test piece. A bowed wafer is one whose cross section in one direction is concave or convex.
OBS: The ""u"" in the expression ""um"" should be the lower case Geek letter ""mu"" which is the metric prefix meaning 1/1,000,000 th.